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Product Detail
Flange Type
Flange Nominal
Sonic Speed Conductance
Pilot Port Direction
Temperature Range
Switch Part Number
Number of Switches
Seal material
Amount of leakage
Seal Change Location
Length of Lead Wire for Switch
Heater Yes/No
type
CAD
Days to Ship
Specification/DimensionsĐặc điểm kỹ thuật / Kích thướcĐặc điểm kỹ thuật / Kích thước
-
Flange Type
- KF
- K
-
Flange Nominal
- 25
- 40
- 50
- 63
- 80
-
Sonic Speed Conductance
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 150
-
Switch Part Number
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. valve open/closed
- No switch
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Seal Change Location
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
-
type
- XLD
- XLD-40
- XLD-63
- XLD-80
-
CADCAD
- 2D
- 3D
Days to ShipSố ngày giao hàng
-
- Alltất cả các
- 31 Day(s) or Less
Specify AlterationsChỉ định thay đổi
Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series (Part Number)
- Volume Discount
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-
- Order Qty :
-
-
- Price :
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-
- Total Price :
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-
- Days to ship :
- ---
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Caution
thận trọng
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Similar Products
Product DetailProduct Description
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
| Part Number | Price | Minimum Order Qty. | Volume Discount | Days to ShipSố ngày giao hàng | Flange Type | Flange Nominal | Sonic Speed Conductance | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | K | 63 | 160L/S | Flange side | 5 to 60 | D-M9P solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | K | 63 | 160L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
167,355 VND | 1 Piece(s) | Available | 31 Day(s) | K | 63 | 160L/S | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | |
- | 1 Piece(s) | Quote | K | 63 | 160L/S | Flange surface, back | 5 to 60 | No auto-switch (with built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | K | 63 | 160L/S | Flange surface, right | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
170,712 VND | 1 Piece(s) | Available | 31 Day(s) | KF | 63 | 160L/S | Flange surface, back | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | |
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, back | 5 to 60 | No auto-switch (with built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, back | 5 to 60 | No auto-switch (with built-in magnet) | No switch | VMQ 1232-70 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | - | None | ||
172,893 VND | 1 Piece(s) | Available | 31 Day(s) | KF | 63 | 160L/S | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | |
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | VMQ 1232-70 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, back | 5 to 60 | D-M9P solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, right | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, right | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, right | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
182,154 VND | 1 Piece(s) | Available | 31 Day(s) | KF | 80 | 200L/S | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | |
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | No auto-switch (with built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
233,238 VND | 1 Piece(s) | Available | 31 Day(s) | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | |
- | 1 Piece(s) | Quote | - | - | - | - | - | - | - | - | - | - | - | - | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9P solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | None | ||
- | 1 Piece(s) | Quote | K | 80 | 200L/S | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | K | 80 | 200L/S | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | K | 80 | 200L/S | Flange side | 5 to 60 | No auto-switch (with built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | K | 80 | 200L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | K | 80 | 200L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | K | 80 | 200L/S | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | K | 80 | 200L/S | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | With heater for 100°C | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, left | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, left | 5 to 60 | D-M9P solid-state auto switch | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | VMQ 1232-70 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | - | - | - | - | - | - | - | - | - | - | - | - | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | With heater for 100°C | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, right | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, right | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | None |
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Basic InformationThông tin cơ bản
| Type | Air-Actuated Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Bellows Seal | Body Surface Treatment | External: hard anodized aluminum, Internal: base material |
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer toCác thông số kỹ thuật và kích thước của mã sản phẩm có thể không được bao phủ đầy đủ. Để biết chi tiết chính xác, hãy tham khảo manufacturer catalogsdanh mục nhà sản xuất ..
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