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Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve (XLDV-25K-5MS)

Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve (XLDV-25K-5MS)
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thận trọng

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Product Description

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

Part Number
XLDV-25K-5MS
Part NumberPriceMinimum Order Qty.Volume DiscountDays to ShipSố ngày giao hàngFlange Type Flange Nominal Voltage Sonic Speed Conductance Pilot Port Direction Switch Part Number Number of Switches Electrical Entry Method Light/Surge Voltage Suppressor CE-marked Length of Lead Wire for Switch
(m)

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Basic InformationThông tin cơ bản

Type High Vacuum Solenoid Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Solenoid Type Single Switching Type 2-Position Normally Closed
Driving Type Directly Operated Pipe Port Type Flange Seal Type Bellows Seal
Seal material FKM 1349-80 Amount of leakage(Pa·m3/s) Internal: 1.3 × 10-10, External: 1.3 × 10-11 Body Surface Treatment External: hard anodized aluminum, Internal: base material
Seal Change Location None