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Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve (XLDV-25K-M9BLA-5G-Q)

Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve (XLDV-25K-M9BLA-5G-Q)
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Caution

thận trọng

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Product Description

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

Part Number
XLDV-25K-M9BLA-5G-Q
Part NumberPriceMinimum Order Qty.Volume DiscountDays to ShipSố ngày giao hàngFlange Type Flange Nominal Voltage Sonic Speed Conductance Pilot Port Direction Switch Part Number Number of Switches Electrical Entry Method Light/Surge Voltage Suppressor CE-marked Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote KF25DC24V14L/SFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)NoneCE-marked3

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Basic InformationThông tin cơ bản

Type High Vacuum Solenoid Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Solenoid Type Single Switching Type 2-Position Normally Closed
Driving Type Directly Operated Pipe Port Type Flange Seal Type Bellows Seal
Seal material FKM 1349-80 Amount of leakage(Pa·m3/s) Internal: 1.3 × 10-10, External: 1.3 × 10-11 Body Surface Treatment External: hard anodized aluminum, Internal: base material
Seal Change Location None