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thận trọng
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Part Number | Price | Minimum Order Qty. | Volume Discount | Days to ShipSố ngày giao hàng | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Pilot Port Direction | Switch Part Number | Number of Switches | Electrical Entry Method | Light/Surge Voltage Suppressor | CE-marked | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 40 | AC110V | 45L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | M-type plug connector | None | CE-marked | 3 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9P solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, left | D-M9P solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 40 | AC100V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 40 | AC100V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | M-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-A93 reed auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | - | - | - | - | - | - | - | - | - | - | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | CE-marked | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | - | - | - | - | - | - | - | - | - | - | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 40 | AC100V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | AC100V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 1 pc. valve open | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 1 pc. valve closed | M-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 5 | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, back | D-M9P solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 40 | AC100V | 45L/S | Flange surface, right | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 40 | DC24V | 45L/S | Flange surface, right | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | None | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 50 | AC100V | 80L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | AC100V | 80L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | AC100V | 80L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | AC100V | 80L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | AC110V | 80L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9B solid-state auto switch | 1 pc. valve closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | AC100V | 80L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | M-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | AC100V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | AC100V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | AC200V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | M-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC12V | 80L/S | Flange surface, back | D-A90 reed auto switch | 1 pc. valve open | M-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC12V | 80L/S | Flange surface, back | D-A90 reed auto switch | 1 pc. valve open | M-type plug connector | With light and surge voltage suppressor (non-polarized type) | CE-marked | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-A93 reed auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | - | - | - | - | - | - | - | - | - | - | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC12V | 80L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | M-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | - | ||
- | 1 Piece(s) | Quote | KF | 50 | AC110V | 80L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | - | - | - | - | - | - | - | - | - | - | - | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | AC100V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 1 pc. valve open | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 1 pc. valve closed | M-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | M-type plug connector | With light and surge voltage suppressor | None | 1 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 1 pc. valve open | M-type plug connector | With light and surge voltage suppressor | None | 1 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 1 pc. valve closed | M-type plug connector | With light and surge voltage suppressor | None | 1 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, back | D-M9P solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | AC110V | 80L/S | Flange surface, right | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 50 | DC24V | 80L/S | Flange surface, right | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | K | 63 | DC24V | 160L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | - |
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Type | High Vacuum Solenoid | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
Driving Type | Directly Operated | Pipe Port Type | Flange | Seal Type | Bellows Seal |
Seal material | FKM 1349-80 | Amount of leakage(Pa·m3/s) | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Body Surface Treatment | External: hard anodized aluminum, Internal: base material |
Seal Change Location | None |
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