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Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve (Part Number)

Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
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Caution

thận trọng

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Product Description

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

Part Number
XLDV-40K-M9BA-3GZ
XLDV-40K-M9BA-5G
XLDV-40K-M9BA-5GZ
XLDV-40K-M9BA-5LZ
XLDV-40K-M9NA-5G
XLDV-40K-M9NA-5GS
XLDV-40K-M9NA-5GZ
XLDV-40K-M9NLA-5M-Q
XLDV-40K-M9PA-5G
XLDV-40K-M9PLA-5HU
XLDV-40L-1G
XLDV-40L-1GZ
XLDV-40L-5G
XLDV-40L-5GZ
XLDV-40L-5MZ
XLDV-40L-A93A-5GZ
XLDV-40L-M9//-5G
XLDV-40L-M9//-5G-Q
XLDV-40L-M9//-5HU
XLDV-40L-M9//-5LU
XLDV-40L-M9//-5LZ
XLDV-40L-M9//-5LZ-Q
XLDV-40L-M9BA-5G
XLDV-40L-M9BA-5GS
XLDV-40L-M9BA-5GU
XLDV-40L-M9BA-5GZ
XLDV-40L-M9BA-5LS
XLDV-40L-M9BA-5LZ
XLDV-40L-M9BLA-5LZ
XLDV-40L-M9NA-1GZ
XLDV-40L-M9NA-5G
XLDV-40L-M9NA-5GZ
XLDV-40L-M9NA-5L
XLDV-40L-M9NA-5LZ
XLDV-40L-M9NB-1G
XLDV-40L-M9NC-5MZ
XLDV-40L-M9NLA-5G
XLDV-40L-M9NLA-5LU
XLDV-40L-M9NZA-5LZ
XLDV-40L-M9PA-5GU
XLDV-40M-1GZ
XLDV-40M-M9NLA-5L
XLDV-50K-1G
XLDV-50K-1GZ
XLDV-50K-1HZ
XLDV-50K-M9BA-1GZ
XLDV-50K-M9BA-3HZ
XLDV-50K-M9BA-5GZ
XLDV-50K-M9BA-5LZ
XLDV-50K-M9BC-5LZ
XLDV-50K-M9NA-1LZ
XLDV-50K-M9NA-5G
XLDV-50K-M9NA-5MZ
XLDV-50L-1G
XLDV-50L-1H
XLDV-50L-2G
XLDV-50L-5GS
XLDV-50L-5GZ
XLDV-50L-5H
XLDV-50L-5HZ
XLDV-50L-5LZ
XLDV-50L-5MZ
XLDV-50L-A90B-6MU
XLDV-50L-A90B-6MU-Q
XLDV-50L-A93A-5LZ
XLDV-50L-M9//-5G
XLDV-50L-M9//-5GS
XLDV-50L-M9//-5LZ
XLDV-50L-M9//-6MU
XLDV-50L-M9BA-3HZ
XLDV-50L-M9BA-5G
XLDV-50L-M9BA-5GZ
XLDV-50L-M9BA-5LZ
XLDV-50L-M9BLA-5GS
XLDV-50L-M9NA-5GS
XLDV-50L-M9NA-5GU
XLDV-50L-M9NA-5GZ
XLDV-50L-M9NA-5H
XLDV-50L-M9NA-5HU
XLDV-50L-M9NB-1G
XLDV-50L-M9NC-5MZ
XLDV-50L-M9NLA-5HU
XLDV-50L-M9NMA-5MZ
XLDV-50L-M9NMB-5MZ
XLDV-50L-M9NMC-5MZ
XLDV-50L-M9NZA-5LZ
XLDV-50L-M9PA-5LZ
XLDV-50M-M9NA-3LZ
XLDV-50M-M9NA-5H
XLDV-63DK-M9//-5LU
Part NumberPriceMinimum Order Qty.Volume DiscountDays to ShipSố ngày giao hàngFlange Type Flange Nominal Voltage Sonic Speed Conductance Pilot Port Direction Switch Part Number Number of Switches Electrical Entry Method Light/Surge Voltage Suppressor CE-marked Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote KF40AC110V45L/SFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)NoneNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, leftD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)NoneNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, leftD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, leftD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, leftD-M9N solid-state auto switch2 pcs. valve open/closedM-type plug connectorNoneCE-marked3

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, leftD-M9P solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)NoneNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, leftD-M9P solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 600 mm)With light and surge voltage suppressor (non-polarized type)None3

-

1 Piece(s) Quote KF40AC100V45L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)NoneNone-

-

1 Piece(s) Quote KF40AC100V45L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)NoneNone-

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backNo auto-switch (no built-in magnet)No switchM-type plug connectorWith light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-A93 reed auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote -----------

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backNo auto-switch (with built-in magnet)No switchGrommet (lead wire length: 300 mm)NoneCE-marked-

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backNo auto-switch (with built-in magnet)No switchGrommet (lead wire length: 600 mm)With light and surge voltage suppressor (non-polarized type)None-

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backNo auto-switch (with built-in magnet)No switchL-type plug connectorWith light and surge voltage suppressor (non-polarized type)None-

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backNo auto-switch (with built-in magnet)No switchL-type plug connectorWith light and surge voltage suppressorNone-

-

1 Piece(s) Quote -----------

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)NoneNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)None0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone3

-

1 Piece(s) Quote KF40AC100V45L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)NoneNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedL-type plug connectorNoneNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40AC100V45L/SFlange surface, backD-M9N solid-state auto switch1 pc. valve openGrommet (lead wire length: 300 mm)NoneNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9N solid-state auto switch1 pc. valve closedM-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)NoneNone3

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressor (non-polarized type)None3

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone5

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, backD-M9P solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)None0.5

-

1 Piece(s) Quote KF40AC100V45L/SFlange surface, rightNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF40DC24V45L/SFlange surface, rightD-M9N solid-state auto switch2 pcs. valve open/closedL-type plug connectorNoneNone3

-

1 Piece(s) Quote KF50AC100V80L/SFlange surface, leftNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)NoneNone-

-

1 Piece(s) Quote KF50AC100V80L/SFlange surface, leftNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF50AC100V80L/SFlange surface, leftNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 600 mm)With light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF50AC100V80L/SFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50AC110V80L/SFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 600 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, leftD-M9B solid-state auto switch1 pc. valve closedL-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50AC100V80L/SFlange surface, leftD-M9N solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, leftD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)NoneNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, leftD-M9N solid-state auto switch2 pcs. valve open/closedM-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50AC100V80L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)NoneNone-

-

1 Piece(s) Quote KF50AC100V80L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 600 mm)NoneNone-

-

1 Piece(s) Quote KF50AC200V80L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)NoneNone-

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)With surge voltage suppressorNone-

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 600 mm)NoneNone-

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backNo auto-switch (no built-in magnet)No switchGrommet (lead wire length: 600 mm)With light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backNo auto-switch (no built-in magnet)No switchL-type plug connectorWith light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backNo auto-switch (no built-in magnet)No switchM-type plug connectorWith light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF50DC12V80L/SFlange surface, backD-A90 reed auto switch1 pc. valve openM-type plug connectorWith light and surge voltage suppressor (non-polarized type)None0.5

-

1 Piece(s) Quote KF50DC12V80L/SFlange surface, backD-A90 reed auto switch1 pc. valve openM-type plug connectorWith light and surge voltage suppressor (non-polarized type)CE-marked0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-A93 reed auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote -----------

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backNo auto-switch (with built-in magnet)No switchGrommet (lead wire length: 300 mm)With surge voltage suppressorNone-

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backNo auto-switch (with built-in magnet)No switchL-type plug connectorWith light and surge voltage suppressorNone-

-

1 Piece(s) Quote KF50DC12V80L/SFlange surface, backNo auto-switch (with built-in magnet)No switchM-type plug connectorWith light and surge voltage suppressor (non-polarized type)None-

-

1 Piece(s) Quote KF50AC110V80L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 600 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)NoneNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote -----------

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With surge voltage suppressorNone3

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)None0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 300 mm)With light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 600 mm)NoneNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 600 mm)With light and surge voltage suppressor (non-polarized type)None0.5

-

1 Piece(s) Quote KF50AC100V80L/SFlange surface, backD-M9N solid-state auto switch1 pc. valve openGrommet (lead wire length: 300 mm)NoneNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch1 pc. valve closedM-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 600 mm)With light and surge voltage suppressor (non-polarized type)None3

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedM-type plug connectorWith light and surge voltage suppressorNone1

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch1 pc. valve openM-type plug connectorWith light and surge voltage suppressorNone1

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch1 pc. valve closedM-type plug connectorWith light and surge voltage suppressorNone1

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9N solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, backD-M9P solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50AC110V80L/SFlange surface, rightD-M9N solid-state auto switch2 pcs. valve open/closedL-type plug connectorWith light and surge voltage suppressorNone0.5

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, rightD-M9N solid-state auto switch2 pcs. valve open/closedGrommet (lead wire length: 600 mm)NoneNone0.5

-

1 Piece(s) Quote K63DC24V160L/SFlange surface, leftNo auto-switch (with built-in magnet)No switchL-type plug connectorWith light and surge voltage suppressor (non-polarized type)None-

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Basic InformationThông tin cơ bản

Type High Vacuum Solenoid Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Solenoid Type Single Switching Type 2-Position Normally Closed
Driving Type Directly Operated Pipe Port Type Flange Seal Type Bellows Seal
Seal material FKM 1349-80 Amount of leakage(Pa·m3/s) Internal: 1.3 × 10-10, External: 1.3 × 10-11 Body Surface Treatment External: hard anodized aluminum, Internal: base material
Seal Change Location None