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Product DetailSpecification/DimensionsĐặc điểm kỹ thuật / Kích thướcĐặc điểm kỹ thuật / Kích thước
-
type
- XLH
- XLH-16
-
Flange Nominal
- 16
- 25
- 40
- 50
-
Sonic Speed Conductance
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-11
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
-
CADCAD
- 2D
- 3D
Days to ShipSố ngày giao hàng
-
- Alltất cả các
- 31 Day(s) or Less
Specify AlterationsChỉ định thay đổi
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series (XLH-50H5)
- Volume Discount
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-
- Order Qty :
-
-
- Price :
- ---
-
- Total Price :
- ---
-
- Days to ship :
- ---
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Caution
thận trọng
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
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Product DetailProduct Description
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
| Part Number |
|---|
| XLH-50H5 |
| Part Number | Price | Minimum Order Qty. | Volume Discount | Days to ShipSố ngày giao hàng | Flange Nominal | Sonic Speed Conductance | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | 50 | 80L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | With heater for 120℃ |
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Basic InformationThông tin cơ bản
| Type | Manual Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Flange Type | KF | Seal Type | Bellows Seal |
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer toCác thông số kỹ thuật và kích thước của mã sản phẩm có thể không được bao phủ đầy đủ. Để biết chi tiết chính xác, hãy tham khảo manufacturer catalogsdanh mục nhà sản xuất ..
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