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thận trọng
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Part Number | Price | Minimum Order Qty. | Volume Discount | Days to ShipSố ngày giao hàng | Flange Type | Flange Nominal | Sonic Speed Conductance | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange side | 5 to 60 | D-A90 reed auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange side | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange side | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, left | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | - | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | VMQ 1232-70 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal / S valve seal assembly / O-ring for fixing | 3 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | No auto-switch (with built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | 0.5 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | CF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | CF | 63 | 160L/S | Angle type | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | CF | 63 | 160L/S | Angle type | Flange side | 5 to 60 | D-A90 reed auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | CF | 63 | 160L/S | Angle type | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | CF | 63 | 160L/S | Angle type | Flange side | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | CF | 63 | 160L/S | Angle type | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | CF | 63 | 160L/S | Angle type | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 |
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Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
Seal Type | Bellows Seal |
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