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Vacuum Valves（Type：High Vacuum Solenoid）
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.
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Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance. [Features] · Flame-retardant (UL94V-0 compliant). · Two types of fittings (face seal fitting and compression fitting) and female threads (Rc, NPT) are available. · Moving the spring from the sliding part of the armature iron core to the body reduces the generation of particulate matter caused by contact with the spring. · Improved sealing performance, securely sealing with its powerful spring. · Power consumption: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (size 3). *For DC specification / class B.
- Volume Discount
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value High Vacuum Solenoid Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Rc / NPT / Face Seal Fitting / Compression Fitting 1/8 / 1/4 / 3/8 - - - - Days to Ship: Số ngày giao hàng: 31 Day(s) or more 
31 Day(s) or more
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SMC
[Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value High Vacuum Solenoid Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Flange - - KF 16 / 25 / 40 / 80 - Days to Ship: Số ngày giao hàng: Quote
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Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve). · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Adjustable flow rate for initial exhaust valve. · Air-operated type with solenoid valve. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value High Vacuum Solenoid Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Flange - - KF / K 25 / 40 / 50 / 63 / 80 - Days to Ship: Số ngày giao hàng: Quote
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Electromagnetic Valve for High Vacuum HVB6· 712 Series
CKD
This is an electromagnetic valve for high vacuum and it provides high vacuum maintaining force and excellent durability. Can be used for back pressure.
- Volume Discount
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value High Vacuum Solenoid Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Flange - - JIS Others - Days to Ship: Số ngày giao hàng: 13 Day(s) or more
13 Day(s) or more
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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
SMC
A vacuum regulator with little heavy metal contamination. [Features] · Aluminum body. · Replaceable bellows. · Uniform baking temperature. · Lightweight and compact. · Low outgassing.
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value High Vacuum Solenoid Single Use Direct 3-Port Valve Single 2-Position Normally Closed Air Pilot - Flange - - NW / Others 16 / 25 / 40 / 50 / 63 - Days to Ship: Số ngày giao hàng: Quote
Quote
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| Product SeriesDòng sản phẩm |
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| Days to ShipSố ngày giao hàng |
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| Switching Type |
| Driving Type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | |
| BrandNhãn hiệu | SMC | SMC | SMC | CKD | SMC |
| Product SeriesDòng sản phẩm | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series | ||
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| Days to ShipSố ngày giao hàng | 31 Day(s) or more | Quote | Quote | 13 Day(s) or more | Quote |
| Type | High Vacuum Solenoid | High Vacuum Solenoid | High Vacuum Solenoid | High Vacuum Solenoid | High Vacuum Solenoid |
| Application | Single Use | Single Use | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 3-Port Valve |
| Solenoid Type | Single | Single | Single | Single | Single |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | Directly Operated | Directly Operated | Directly Operated | Directly Operated | Air Pilot |
| Effective Sectional Area(mm2) | - | - | - | - | - |
| Pipe Port Type | Rc / NPT / Face Seal Fitting / Compression Fitting | Flange | Flange | Flange | Flange |
| Plumbing Thread Nominal | 1/8 / 1/4 / 3/8 | - | - | - | - |
| Connecting Tube Diameter | - | - | - | - | - |
| Flange Type | - | KF | KF / K | JIS | NW / Others |
| Flange Nominal | - | 16 / 25 / 40 / 80 | 25 / 40 / 50 / 63 / 80 | Others | 16 / 25 / 40 / 50 / 63 |
| CV Value | - | - | - | - | - |
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ConfigureTạo
Specification/DimensionsĐặc điểm kỹ thuật / Kích thướcĐặc điểm kỹ thuật / Kích thước
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Type
- Solenoid Valve
- High Vacuum Solenoid
- Vacuum Delay Solenoid Valve
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
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Application
- Single Use
- Multi-Port
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Mounting Orientation
- Direct
- Manifold Base
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Number of Ports
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2-Port Valve
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3-Port Valve
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2-Port Valve
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Solenoid Type
- Single
- Double
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Switching Type
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2-Position Normally Open
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2-Position Normally Closed
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Others
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2-Position Normally Open
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Driving Type
- Directly Operated
- External Pilot Shape
- Air Pilot
- Vacuum Pilot
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Effective Sectional Area(mm2)
The Diameter of the A / B Port Connection Tube
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Pipe Port Type
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Plumbing Thread Nominal
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Connecting Tube Diameter
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Flange Type
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Flange Nominal
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CV Value
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