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Product Detail
Flange Type
Flange Nominal
Voltage
Sonic Speed Conductance
Pilot Port Direction
Switch Part Number
Number of Switches
Electrical Entry Method
Light/Surge Voltage Suppressor
CE-marked
Length of Lead Wire for Switch
type
CAD
Specification/DimensionsĐặc điểm kỹ thuật / Kích thướcĐặc điểm kỹ thuật / Kích thước
-
Flange Type
- KF
- K
-
Flange Nominal
- 25
- 40
- 50
- 63
- 80
-
Voltage
- DC12V
- DC24V
- AC100V
- AC200V
- AC110V
- AC220V
-
Sonic Speed Conductance
-
Pilot Port Direction
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Switch Part Number
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. valve open/closed
- No switch
-
Electrical Entry Method
- Grommet (lead wire length: 300 mm)
- Grommet (lead wire length: 600 mm)
- L-type plug connector
- M-type plug connector
-
Light/Surge Voltage Suppressor
- None
- With light and surge voltage suppressor
- With light and surge voltage suppressor (non-polarized type)
- With surge voltage suppressor
-
CE-marked
- CE-marked
- None
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
type
- XLDV
- XLDV-25
- XLDV-40
- XLDV-50
- XLDV-63
- XLDV-80
-
CADCAD
- 2D
- 3D
Specify AlterationsChỉ định thay đổi
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
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Caution
thận trọng
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Similar Products
Product DetailProduct Description
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
| Part Number | Price | Minimum Order Qty. | Volume Discount | Days to ShipSố ngày giao hàng | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Pilot Port Direction | Switch Part Number | Number of Switches | Electrical Entry Method | Light/Surge Voltage Suppressor | CE-marked | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 25 | AC100V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | AC100V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | AC200V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | AC200V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | - | - | - | - | - | - | - | - | - | - | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | CE-marked | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | M-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC12V | 14L/S | Flange surface, left | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | AC100V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | AC100V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | AC110V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 1 pc. valve open | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | AC100V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | CE-marked | 3 | ||
- | 1 Piece(s) | Quote | KF | 25 | AC200V | 14L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | M-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC12V | 14L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9N solid-state auto switch | 1 pc. valve closed | M-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9P solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, left | D-M9P solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor (non-polarized type) | None | 5 | ||
- | 1 Piece(s) | Quote | KF | 25 | AC100V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | AC100V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | AC110V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | CE-marked | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | CE-marked | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | L-type plug connector | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | - | - | - | - | - | - | - | - | - | - | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (no built-in magnet) | No switch | M-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | D-A93 reed auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | None | CE-marked | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | - | - | - | - | - | - | - | - | - | - | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | Grommet (lead wire length: 600 mm) | With light and surge voltage suppressor (non-polarized type) | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | L-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | No switch | M-type plug connector | With light and surge voltage suppressor | None | - | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 25 | DC24V | 14L/S | Flange surface, back | D-M9B solid-state auto switch | 2 pcs. valve open/closed | L-type plug connector | With light and surge voltage suppressor | CE-marked | 0.5 |
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Basic InformationThông tin cơ bản
| Type | High Vacuum Solenoid | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
| Driving Type | Directly Operated | Pipe Port Type | Flange | Seal Type | Bellows Seal |
| Seal material | FKM 1349-80 | Amount of leakage(Pa·m3/s) | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Body Surface Treatment | External: hard anodized aluminum, Internal: base material |
| Seal Change Location | None |
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer toCác thông số kỹ thuật và kích thước của mã sản phẩm có thể không được bao phủ đầy đủ. Để biết chi tiết chính xác, hãy tham khảo manufacturer catalogsdanh mục nhà sản xuất ..
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